人工晶体学报, 2017, 46(1): 158-162.
以甲烷为前驱体，采用等离子体增强化学气相沉积( PECVD)技术沉积类富勒烯碳基( FL-C∶H)薄膜于单晶硅基底材料表面。利用高分辨透射电镜( HRTEM)和拉曼光谱仪( Ramman)对薄膜的结构形貌进行表征；通过原位纳米力学测试系统和摩擦磨损试验机分析比较薄膜在不同甲烷流量的情况下的力学特征及摩擦学特性。实验结果表明：所制备的碳基薄膜具有类富勒烯纳米结构特征，甲烷流量对类富勒烯碳基薄膜( FL-C∶H)的结构和性能具有较大的影响；薄膜的弹性模量、硬度以及薄膜中的类富勒烯结构随着甲烷流量的增加而减小，但是摩擦系数对甲烷流量的变化不敏感。
引用：
吴坤尧,
宗彦旭,
龚珍彬,
杨常清,
李兆,
鲁媛媛,
孟志新
甲烷流量对类富勒烯碳基薄膜结构与摩擦学性能的影响.
人工晶体学报,
2017, 46(1): 158-162.
doi:
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